
Features
• Hydra Configuration support has been implemented in ngUI
o User can easily switch between gases from ngUI (change takes just a few minutes)
• New Ion Alignment Flow has been put in place
o Updated Mechanical Alignment
o New Baseline Apperture Alignment (Optimal Apperture holes position)
o New PFIB ALA Alignment (Focus, Stigmator, Quad, Wobble)
• IPC Mini HW is supported
Bug Fixes
• Rocking Polish Improvements
• Stage homing procedure for 6" & 110mm stages has been modified. Now homing in positive tilt Y
• Service Apperture Alignment has been fixed
• Spin Mill support for 6" stage
貨物類號:FEI PFIB
貨物庫存:本商品現貨庫存1PCS
貨物貨期:到中國490工作日,全球DHL送達350工作日。
貨物儲存:NL

